专利名称：Substrate processing system
发明人：Chuan-Chang Feng,Mao-Lin Liu,Ting-Yu Wu申请号：US16204511申请日：20181129公开号：US11101157B2公开日：20210824
专利附图：
摘要：A substrate processing system includes a substrate processing set and asubstrate holding unit. The substrate processing set includes a substrate supporting partfor supporting a vertical substrate. The substrate holding unit includes two cantileversand two substrate holding parts. Each of the substrate holding parts is respectively
located on each of the cantilevers. The two substrate holding parts are used for holdingthe substrate vertically. When the substrate holding unit moves next to the substrateprocessing set and the two substrate holding parts touch the substrate, the twosubstrate holding parts hold the substrate.
申请人：Scientech Corporation
地址：Taipei TW
国籍：TW
代理机构：Muncy, Geissler, Olds & Lowe, P.C.
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