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SEMICONDUCTOR STRUCTURE WITH ENHANCED WITHSTAND VO

2020-04-12 来源:钮旅网
专利内容由知识产权出版社提供

专利名称:SEMICONDUCTOR STRUCTURE WITH

ENHANCED WITHSTAND VOLTAGE

发明人:Alexis BAVARD,Matthew CHARLES申请号:US15266125申请日:20160915

公开号:US20170084697A1公开日:20170323

专利附图:

摘要:A semiconductor structure including a substrate, a buffer layer, a superlatticeformed on the buffer layer , the superlattice including a pattern including n layers madeof different materials, n being at least equal to 2, each layer including an AlGaInBN type

material where x+y+w+z=1, the thickness of each layer being less than the criticalthickness thereof, the number of patterns being at least equal to 50, an insert layerwherein the material has a first lattice parameter, a layer of GaN material, wherein thelattice parameter is greater than the first lattice parameter such that the layer of GaNmaterial is compressed by the insert layer.

申请人:Commissariat a L'Energie Atomique et aux Energies Alternatives

地址:Paris FR

国籍:FR

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