METHOD, ANALYSIS SYSTEM AND COMPUTER PROGRAM PRODU

专利名称：METHOD, ANALYSIS SYSTEM AND

COMPUTER PROGRAM PRODUCT FOR SEMI-AUTOMATED X-RAY ELEMENTAL ANALYSISUSING A PARTICLE MICROSCOPE

发明人：Hill, Edward申请号：EP16000567.4申请日：20160309公开号：EP3217420A1公开日：20170913

专利附图：

摘要：The invention relates to a system including a data analysis system for

interactively generating elemental local composition data of an object depending onphoton radiation data acquired by using a charged particle microscope, and a method ofoperating said system. A plurality of local spectral data sets (72) are read, each beingindicative of an energy spectrum of photon radiation emitted in response to irradiationby a charged particle beam. Each of the local spectral data sets represents a

measurement performed in a respective measurement region of the object. Two or moreof the plurality of local spectral data sets are combined to obtain combined spectraldata (71). The combined spectral data are then evaluated to extract a list of candidates(80-84) for determing the elements which cause emission line peaks in the respectivelocal spectral data set. Additionally or alternatively, energy values (76, 77, 78) or energyranges (73,74,75) areselected based on the combined spectral data for efficientbackground subtraction for each of the local spectral data sets.

申请人：Carl Zeiss Microscopy Ltd.

地址：509 Coldhams Lane Cambridge CB1 3JS GB

国籍：GB

代理机构：Diehl & Partner GbR

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