6700F
1
2
ExchangeHome
3 Z8mmT0
Z
T
X
Y
4 EXCH POSN
EVAC VENT HLDR
EXCH POSN
5 VENTVENTVENT
6
3mm
ZT
7
8 EVACEVACEVAC
9 1
HLDR
10
1
2
ExchangeHome
3 Z8mmT0
4 EXCH POSN
5
6 HLDR
7 VENTVENTVENT
8 EVAC
1
2
Y
X
3
Y X
R
Stage
Stage Control
Step
Field
1
5KV15KV20KV
Probe Current
SEI78BEI810EDS12
Emission Current
10AWD
368mm
2
1/4
XYXY
3
ZWDZ
5104Pa
GUN VALVE CLOSE
V1
ALIGNOL Stigmator90XY
Y
XY
X
OL ApertureWOBB
XYXY
67
RDC IMAGEFINE VIEWFREEZEFREEZEFREEZE
FREEZEQUICK VIEW
GUN VALVE
ExportSave
CLOSE V1
Gun Alignment
Probe Current15XYProbe Current15Probe CurrentProbe Current15
Stig Center X
X
WOBBXY
Stig Center Y
Y
WOBBXY
CL Stigmator
Probe Current 15OL Stigmator
Center
1000XY
Align Clear
XY
Lens Clear
1
20EVACLow temperature of DP 2
20
因篇幅问题不能全部显示,请点此查看更多更全内容