专利名称：Efficient process tool utilization in
semiconductor manufacturing using anadditional process tool state
发明人：Hang Thi Yen Black,Arturo Nicholas
Morosoff
申请号：US09362636申请日：19990726公开号：US06430456B1公开日：20020806
专利附图：
摘要：A method, system, and storage medium for increasing the efficiency of
integrated circuit (IC) manufacture by improvements in manufacturing equipment usageare provided. Process tools are assigned to one of three operating states: up, down, orconditional. In the up state, process tools are available for manufacturing. After certainmanufacturing steps, the quality of the ICs being made upon wafers is evaluated. Ifpotentially defective ICs are found, process tools that have processed the wafer may beplaced in the conditional state. In this state, process tools are allowed to continuemanufacturing, albeit only for a limited period. The conditional state gives personnel timeto determine which process tool is responsible for the defective product. The
responsible process tool is then placed in the down state while all others are placed backin the up state. Once the problem with the process tool in the down state is presumablyrepaired, it is placed in the conditional state. If the limited quantity of wafers thenprocessed by the process tool are found to be acceptable, the tool is placed in the upstate; otherwise, it is placed back in the down state. The conditional state allowspersonnel to investigate the problem without halting production and determine theexact process tool to take out of production while the limited period of the conditionalstate limits the quantity of potentially defective product.
申请人：ADVANCED MICRO DEVICES, INC.
代理机构：Conley, Rose & Tayon P.C.
代理人：Kevin L. Daffer
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