MEASUREMENT DEVICE AND MEASUREMENT METHOD

专利名称：MEASUREMENT DEVICE AND

MEASUREMENT METHOD

发明人：KATSUYAMA Jun,MATSUMOTO

Yoshinori,SHINAGAWA Mitsuru

申请号：EP19865218.2申请日：20190919公开号：EP3859355A1公开日：20210804

专利附图：

摘要：A measurement device includes an electric field generator configured togenerate an alternating current electric field, an electric field detector disposed to face

the electric field generator at a distance from the electric field generator and configuredto detect the alternating current electric field generated by the electric field generator,a thickness gauge configured to measure a thickness of a measurement target in a non-contact manner, and a processor configured to derive a calibration curve representing arelationship between a specific dielectric constant and an intensity of an alternatingcurrent electric field. The measurement target is insertable between the electric fieldgenerator and the electric field detector. The electric field detector is configured todetect an intensity of the alternating current electric field attenuated by themeasurement target. The processor is configured to calculate a specific dielectricconstant of the measurement target on the basis of the detected intensity of thealternating current electric field, the measured thickness, and the derived calibrationcurve.

申请人：Yokogawa Electric Corporation,Hosei University

地址：9-32, Naka-cho, 2-chome Musashino-shi Tokyo 180-8750 JP,2-17-1 FujimiChiyoda-ku Tokyo 102-8160 JP

国籍：JP,JP

代理机构：Grünecker Patent- und Rechtsanwälte PartG mbB

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